Journal de Physique IV

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Unique precursor delivery and control afforded by low-pressure pulsed-CVD process with ultrasonic atomization

S. Krumdieck, O. Sbaizero and R. Raj

J. Phys. IV France, 11 PR3 (2001) Pr3-1161-Pr3-1168

DOI: 10.1051/jp4:20013146

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