Journal de Physique IV

0

Subscriber Authentication Point

EDPS Account

Search

Menu

Structure and composition investigation of RPECVD SiCN and LPCVD BCN films

M.L. Kosinova, N.I Fainer, Yu.M. Rumyantsev, M. Terauchi, K. Shibata, F. Satoh, M. Tanaka and F.A. Kuznetsov

J. Phys. IV France, 11 PR3 (2001) Pr3-987-Pr3-994

DOI: 10.1051/jp4:20013124

M.L. Kosinova

N.I Fainer

Yu.M. Rumyantsev

M. Terauchi

K. Shibata

F. Satoh

M. Tanaka

F.A. Kuznetsov

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)

Copyright / Published by: EDP Sciences