Journal de Physique IV

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Room temperature deposition of GeO₂ thin film using dielectric barrier discharge driven excimer lamps

Y. Maezono, H. Yanagita, K. Nishi, J.-I. Miyano, A. Yokotani, K. Kurosawa, N. Hishinuma and H. Matsuno

J. Phys. IV France, 11 PR3 (2001) Pr3-811-Pr3-816

DOI: 10.1051/jp4:20013102

Y. Maezono

H. Yanagita

K. Nishi

J.-I. Miyano

A. Yokotani

K. Kurosawa

N. Hishinuma

H. Matsuno

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Copyright / Published by: EDP Sciences