Journal de Physique IV

Elementary steps and application of the CVD of SiC/BN double layers

S. Hemeltjen, J. Heinrich, G. Marx, D. Dietrich, K. Nestler, K. Weise and S. Stöckel

J. Phys. IV France, 11 PR3 (2001) Pr3-77-Pr3-84

DOI: 10.1051/jp4:2001310

S. Hemeltjen

J. Heinrich

G. Marx

D. Dietrich

K. Nestler

K. Weise

S. Stöckel

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