Journal de Physique IV

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Effects of active surface nitridation on the properties of high permittivity films deposited by UV-assisted CVD

B.J. O'Sullivan, E. O'Connor, R. Howley, P.K. Hurley, J.-Y. Zhang, N. Kaliwoh, Q. Fang, I. W. Boyd, C. Dubourdieu, M.A. Audier et al. (5 more)

J. Phys. IV France, 11 PR11 (2001) Pr11-261-Pr11-265

DOI: 10.1051/jp4:20011142

B.J. O'Sullivan

E. O'Connor

R. Howley

P.K. Hurley

J.-Y. Zhang

N. Kaliwoh

Q. Fang

I. W. Boyd

C. Dubourdieu

M.A. Audier

J.P. Sénateur

H.O. Davies

T.J. Leedham

A.C. Jones

B. Semmache

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