Journal de Physique IV

Mechanical behaviour of a multilayer system for microelectronic applications

O. Bernard, S. Poulat, S. Poissonnet, A.-M. Huntz and M. Andrieux

J. Phys. IV France, 11 PR11 (2001) Pr11-35-Pr11-39

DOI: 10.1051/jp4:20011105

O. Bernard

S. Poulat

S. Poissonnet

A.-M. Huntz

M. Andrieux

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