Journal de Physique IV

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Caractérisation du mode de durcissement structural des couches implantées à haute énergie par les techniques de nanoindentation et de diffraction des rayons X en incidence rasante

H. Pelletier, M. Bach, J.J. Grob and P. Mille

J. Phys. IV France, 10 PR10 (2000) Pr10-245-Pr10-254

DOI: 10.1051/jp4:20001027

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