Journal de Physique IV

In situ mass spetrometry during laser-induced chemical vapor deposition of silicon carbonitride

G. Korevaar, W. Besling, A. Goossens and J. Schoonman

J. Phys. IV France, 09 PR8 (1999) Pr8-763-Pr8-768

DOI: 10.1051/jp4:1999896

G. Korevaar

W. Besling

A. Goossens

J. Schoonman

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)