Journal de Physique IV

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Plasma-enhanced chemical vapour deposition and structural characterization of amorphous chalcogenide films

P. Nagels, R. Callaerts and R. Mertens

J. Phys. IV France, 09 PR8 (1999) Pr8-717-Pr8-724

DOI: 10.1051/jp4:1999890

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