Journal de Physique IV

Deposition of Ta₂O₅ and (TiO₂)-(Ta₂O₅) films from Ta(OEt)₄(DMAE) and Ti(OEt)₂(DMAE)₂, by IMOCVD

C. Jiménez, M. Paillous, R. Madar, J.P. Sénateur and A.C. Jones

J. Phys. IV France, 09 PR8 (1999) Pr8-569-Pr8-573

DOI: 10.1051/jp4:1999871

C. Jiménez

M. Paillous

R. Madar

J.P. Sénateur

A.C. Jones

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