Journal de Physique IV

Laser CVD of silicon nanoclusters and in-situ process chataracterization

A. Goossens, W.F.A. Besling and J. Schoonman

J. Phys. IV France, 09 PR8 (1999) Pr8-519-Pr8-528

DOI: 10.1051/jp4:1999865

A. Goossens

W.F.A. Besling

J. Schoonman

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