Journal de Physique IV

Low pressure chemical vapour deposition of CN_x layers by interaction between tetramethylguanidine and cyanurchloride

L. Zambov, B. Ivanov, G. Georgiev, C. Popov, V. Vassilev and G. Beshkov

J. Phys. IV France, 09 PR8 (1999) Pr8-501-Pr8-508

DOI: 10.1051/jp4:1999863

L. Zambov

B. Ivanov

G. Georgiev

C. Popov

V. Vassilev

G. Beshkov

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