Journal de Physique IV

Atomic layer deposited thin films for corrosion protection

R. Matero, M. Ritala, M. Leskelä, T. Salo, J. Aromaa and O. Forsén

J. Phys. IV France, 09 PR8 (1999) Pr8-493-Pr8-499

DOI: 10.1051/jp4:1999862

R. Matero

M. Ritala

M. Leskelä

T. Salo

J. Aromaa

O. Forsén

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