Journal de Physique IV

Layer-by-layer growth of silicon nitride films by NH₃ and SiH₄

T. Watanabe, M. Sakuraba, T. Matsuura and J. Murota

J. Phys. IV France, 09 PR8 (1999) Pr8-333-Pr8-340

DOI: 10.1051/jp4:1999841

T. Watanabe

M. Sakuraba

T. Matsuura

J. Murota

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