Journal de Physique IV

Study of the growth mechanism of CVD silicon films on silica by X-ray reflectivity, atomic force microscopy and scanning electron microscopy

A. van der Lee, J. Durand, D. Cot and L. Vázquez

J. Phys. IV France, 09 PR8 (1999) Pr8-157-Pr8-164

DOI: 10.1051/jp4:1999819

A. van der Lee

J. Durand

D. Cot

L. Vázquez

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