Journal de Physique IV

Correlations between stress and microstructure into LPCVD silicon films

P. Temple-Boyer, B. de Mauduit, B. Caussat and J.P. Couderc

J. Phys. IV France, 09 PR8 (1999) Pr8-1107-Pr8-1114

DOI: 10.1051/jp4:19998138

P. Temple-Boyer

B. de Mauduit

B. Caussat

J.P. Couderc

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