Phase and surface roughness evolution for as-deposited LPCVD silicon films C. Cobianu, R. Plugaru, N. Nastase, S. Nastase, C. Flueraru, M. Modreanu, J. Adamczevska, W. Paszkowicz, J. Auleytner and P. Cosmin J. Phys. IV France, 09 PR8 (1999) Pr8-1083-Pr8-1090 DOI: 10.1051/jp4:19998135