Journal de Physique IV

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Phase and surface roughness evolution for as-deposited LPCVD silicon films

C. Cobianu, R. Plugaru, N. Nastase, S. Nastase, C. Flueraru, M. Modreanu, J. Adamczevska, W. Paszkowicz, J. Auleytner and P. Cosmin

J. Phys. IV France, 09 PR8 (1999) Pr8-1083-Pr8-1090

DOI: 10.1051/jp4:19998135

C. Cobianu

R. Plugaru

N. Nastase

S. Nastase

C. Flueraru

M. Modreanu

J. Adamczevska

W. Paszkowicz

J. Auleytner

P. Cosmin

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Copyright / Published by: EDP Sciences