Journal de Physique IV

XPS and XPS valence band characterizations of amorphous or polymeric silicon based thin films prepared by PACVD from organosilicon monomers

R. Berjoan, E. Biche, D. Perarnau, S. Roualdes and J. Durand

J. Phys. IV France, 09 PR8 (1999) Pr8-1059-Pr8-1068

DOI: 10.1051/jp4:19998132

R. Berjoan

E. Biche

D. Perarnau

S. Roualdes

J. Durand

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