Journal de Physique IV

In-situ-spectroscopic monitoring for SIC-CVD process control

K. Brennfleck, S. Schneweis and R. Weiss

J. Phys. IV France, 09 PR8 (1999) Pr8-1041-Pr8-1048

DOI: 10.1051/jp4:19998130

K. Brennfleck

S. Schneweis

R. Weiss

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