Journal de Physique IV

Deposition of tungsten by plasma enhanced chemical vapour deposition

M.F. Bain, B.M. Armstrong and H.S. Gamble

J. Phys. IV France, 09 PR8 (1999) Pr8-827-Pr8-833

DOI: 10.1051/jp4:19998105

M.F. Bain

B.M. Armstrong

H.S. Gamble

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