Journal de Physique IV

Photo-MOCVD of Cu thin films using Cu(hfa)(MHY) as precursor

S. Vidal, F. Maury, A. Gleizes, T.-Y. Chen and P. Doppelt

J. Phys. IV France, 09 PR8 (1999) Pr8-791-Pr8-798

DOI: 10.1051/jp4:19998100

S. Vidal

F. Maury

A. Gleizes

T.-Y. Chen

P. Doppelt

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