Journal de Physique IV

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Photosensitive sol-gel precursors for direct ultra-violet patterning of SiO₂ and PZT materials

S.P. Faure, O. Chaux and P. Gaucher

J. Phys. IV France, 08 PR9 (1998) Pr9-69-Pr9-72

DOI: 10.1051/jp4:1998911

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