Journal de Physique IV

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Deep etch lithography at LURE-D.C.I. storage ring

S. Megtert, A. Labèque, Liu Zewen, H. Dexpert, R. Comès, F. Rousseaux, M.F. Ravet, H. Launois, S. Ballandras, W. Daniau et al. (4 more)

J. Phys. IV France, 04 C9 (1994) C9-269-C9-272

DOI: 10.1051/jp4:1994947

S. Megtert

A. Labèque

Liu Zewen

H. Dexpert

R. Comès

F. Rousseaux

M.F. Ravet

H. Launois

S. Ballandras

W. Daniau

S. Basrour

M. Rouillay

P. Blind

D. Hauden

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