Laser reactive ablation of thin nitride films E. D'ANNA, M.L. DE GIORGI, G. LEGGIERI, A. LUCHES, G. MAJNI, M. MARTINO, I.N. MIHAILESCU and P. MENGUCCI J. Phys. IV France, 04 C4 (1994) C4-51-C4-54 DOI: 10.1051/jp4:1994409
