Journal de Physique IV

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Propriétés des couches de ZrO₂ et de HfO₂ obtenues par évaporation thermique réactive

F. TCHELIEBOU, A. BOYER and J.P. CHERON

J. Phys. IV France, 03 C7 (1993) C7-1003-C7-1006

DOI: 10.1051/jp4:19937156

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