Journal de Physique IV

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Kinetic laws of the chemical process in the CVD of SiC ceramics from CH₃SiCl₃-H₂ precursor

F. LOUMAGNE, F. LANGLAIS and R. NASLAIN

J. Phys. IV France, 03 C3 (1993) C3-527-C3-533

DOI: 10.1051/jp4:1993373

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