Journal de Physique IV

Deposition of titanium-based films by laser-assisted thermal CVD of titanium tetrachloride

R. ALEXANDRESCU, R. CIREASA, B. DRAGNEA, I. MORJAN, I. VOICU and A. ANDREI

J. Phys. IV France, 03 C3 (1993) C3-265-C3-272

DOI: 10.1051/jp4:1993336

R. ALEXANDRESCU

R. CIREASA

B. DRAGNEA

I. MORJAN

I. VOICU

A. ANDREI

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