Journal de Physique IV

EPMA and ellipsometric characterization of PECVD boron-carbon films

A.I. KANAEV, S. Yu. RYBAKOV and M.N. CHURAEVA

J. Phys. IV France, 03 C3 (1993) C3-183-C3-188

DOI: 10.1051/jp4:1993323

A.I. KANAEV

S. Yu. RYBAKOV

M.N. CHURAEVA

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