Journal de Physique IV

AES characterization and depth profiles measurements of AIN thin films on SiO₂ substrates

B. ASPAR, R. BERJOAN, B. ARMAS and D. PERARNAU

J. Phys. IV France, 03 C3 (1993) C3-171-C3-176

DOI: 10.1051/jp4:1993321

B. ASPAR

R. BERJOAN

B. ARMAS

D. PERARNAU

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