Journal de Physique IV

Formation of CVD copper films investigated by surface analysis and reflectivity

Z. HAMMADI, B. LECOHIER, A. CROS and H. DALLAPORTA

J. Phys. IV France, 03 C3 (1993) C3-91-C3-98

DOI: 10.1051/jp4:1993311

Z. HAMMADI

B. LECOHIER

A. CROS

H. DALLAPORTA

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