Journal de Physique IV

ANALYSIS OF CVD BY SURFACE ANALYSIS TECHNIQUES AND IN-SITU MASS SPECTROMETRY

P.A.C. GROENEN, J.G.A. HÖLSCHER and H.H. BRONGERSMA

J. Phys. IV France, 02 C2 (1991) C2-185-C2-191

DOI: 10.1051/jp4:1991223

P.A.C. GROENEN

J.G.A. HÖLSCHER

H.H. BRONGERSMA

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