Journal de Physique IV

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AN EXPERIMENTAL KINETIC STUDY OF BORON NITRIDE CVD FROM BF₃-NH₃-Ar MIXTURES

S. PROUHET, A. GUETTE and F. LANGLAIS

J. Phys. IV France, 02 C2 (1991) C2-119-C2-126

DOI: 10.1051/jp4:1991214

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