Journal de Physique IV

CVD OF COPPER USING CuCl AS PRECURSOR

C. LAMPE-ÖNNERUD, A. HÅRSTA and U. JANSSON

J. Phys. IV France, 02 C2 (1991) C2-881-C2-888

DOI: 10.1051/jp4:19912105

C. LAMPE-ÖNNERUD

A. HÅRSTA

U. JANSSON

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