Journal de Physique IV

SELECTIVE R.T.L.P.C.V.D. OF TUNGSTEN BY SILANE REDUCTION ON PATTERNED PPQ/Si WAFERS

A. BOUTEVILLE, T. CHARRIER, J.C. REMY, J. PALLEAU and J. TORRES

J. Phys. IV France, 02 C2 (1991) C2-857-C2-864

DOI: 10.1051/jp4:19912102

A. BOUTEVILLE

T. CHARRIER

J.C. REMY

J. PALLEAU

J. TORRES

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)