Journal de Physique IV

AN UNDERSTANDING OF IN SITU BORON DOPED POLYSILICON FILMS BY CHARACTERIZATION AND SIMULATION

C. AZZARO, E. SCHEID, D. BIELLE-DASPET, P. DUVERNEUIL and P. BOUDRE

J. Phys. IV France, 02 C2 (1991) C2-79-C2-85

DOI: 10.1051/jp4:1991209

C. AZZARO

E. SCHEID

D. BIELLE-DASPET

P. DUVERNEUIL

P. BOUDRE

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