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Piezoelectric thin films for MEMS applications—A comparative study of PZT, 0.7PMN–0.3PT and 0.9PMN–0.1PT thin films grown on Si by r.f. magnetron sputtering
Romain Herdier, M. Detalle, David Jenkins, Caroline Soyer and Denis Remiens Sensors and Actuators A: Physical 148(1) 122 (2008) https://doi.org/10.1016/j.sna.2008.07.021
Local Piezoelectric Hysteresis Loops for the Study of Electrical Properties of 0.7Pb(Mg1/3Nb2/ 3)O3-0.3PbTiO3 Thin Films: Bottom Electrode Dependence and Film Thickness Effect
Low temperature perovskite crystallization of 70%PbMg1∕3Nb2∕3O3–30%PbTiO3 thin films deposited by sputtering and their electrical performance evaluation
NANOSCALE INVESTIGATIONS OF ELECTRICAL PROPERTIES IN RELAXOR Pb(Mg1/3Nb2/3)O3-PbTiO3 THIN FILMS DEPOSITED ON PLATINUM AND LaNiO3 ELECTRODES BY MEANS OF LOCAL PIEZOELECTRIC RESPONSE