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Cited article:

Deep etch lithography at LURE-D.C.I. storage ring

S. Megtert, A. Labèque, Liu Zewen, H. Dexpert, R. Comès, F. Rousseaux, M.F. Ravet, H. Launois, S. Ballandras, W. Daniau

J. Phys. IV France, 04 C9 (1994) C9-269-C9-272

DOI: https://doi.org/10.1051/jp4:1994947

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This article has been cited by the following article(s):

Microgrippers fabricated by the LIGA technique

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