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Cited article:

Low Temperature Plasma Enhanced CVD Synthesis of Piezoactive ZnO Films

T.V. Tabenskaya, V.P. Ovsyannikov, E.A. Mazurenko

J. Phys. IV France, 05 C5 (1995) C5-711-C5-715

DOI: https://doi.org/10.1051/jphyscol:1995586

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