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Cited article:

Optimum Design of LPCVD Reactors

L.M. Zambov

J. Phys. IV France, 05 C5 (1995) C5-269-C5-276

DOI: https://doi.org/10.1051/jphyscol:1995531

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This article has been cited by the following article(s):

MBPCA application for fault detection in NMOS fabrication

S. Lachman-Shalem, N. Haimovitch, E.N. Shauly and D.R. Lewin
IEEE Transactions on Semiconductor Manufacturing 15 (1) 60 (2002)
https://doi.org/10.1109/66.983445