Articles citing this article

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Cited article:

Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films

Thomas Henke, Martin Knaut, Christoph Hossbach, et al.
ECS Journal of Solid State Science and Technology 4 (7) P277 (2015)
https://doi.org/10.1149/2.0301507jss

Atomic-order thermal nitridation of Si(100) and subsequent growth of Si

T. Watanabe, M. Sakuraba, T. Matsuura and J. Murota
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (4) 1907 (2001)
https://doi.org/10.1116/1.1359549

Surface Termination of the Ge(100) and Si(100) Surfaces by Using DHF Solution Dipping

M. Sakuraba, T. Matsuura and J. Murota
MRS Proceedings 535 (1998)
https://doi.org/10.1557/PROC-535-281