Articles citing this article

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Cited article:

Microstructure and Mechanical Properties of ZrN, ZrCN and ZrC Coatings Grown by Chemical Vapor Deposition

Florian Frank, Michael Tkadletz, Christoph Czettl and Nina Schalk
Coatings 11 (5) 491 (2021)
https://doi.org/10.3390/coatings11050491

Identification of influence factors in a thermal model of a plasma-assisted chemical vapor deposition process

Sébastien Rouquette, Laurent Autrique, Charles Chaussavoine and Laurent Thomas
Inverse Problems in Science and Engineering 15 (5) 489 (2007)
https://doi.org/10.1080/17415970600838764