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Cited article:

Laser-Induced Chemical Vapour Deposition of Silicon Carbonitride

W.F.A. Besling, P.J.J.M. van der Put, J. Schoonman

J. Phys. IV France, 05 C5 (1995) C5-953-C5-960

DOI: https://doi.org/10.1051/jphyscol:19955112

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This article has been cited by the following article(s):

Synthesis and Physicochemical Properties of Nanocrystalline Silicon Carbonitride Films Deposited by Microwave Plasma from Organoelement Compounds

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Study of structure and phase composition of nanocrystal silicon carbonitride films

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Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 470 (1-2) 193 (2001)
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