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Cited article:

Characterization of Buffer Layers for SiC CVD

V. Cimalla, J. Pezoldt, G. Ecke, H. Rößler, G. Eichhorn

J. Phys. IV France, 05 C5 (1995) C5-863-C5-870

DOI: https://doi.org/10.1051/jphyscol:19955102

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This article has been cited by the following article(s):

The surface morphological evolution of ultrathin SiC buffer layer grown on Si (100) substrate by atmospheric pressure chemical vapor deposition

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Journal of Materials Research 1 (2012)
https://doi.org/10.1557/jmr.2012.259

Tuning Residual Stress in 3C-SiC(100) on Si(100)

Jörg Pezoldt, Thomas Stauden, Florentina Niebelschütz, et al.
Materials Science Forum 645-648 159 (2010)
https://doi.org/10.4028/www.scientific.net/MSF.645-648.159