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Cited article:

Kinetic Processes in the CVD of SiC from CH₃SiCl₃-H₂ in a Vertical Hot-Wall Reactor

F. Langlais, F. Loumagne, D. Lespiaux, S. Schamm, R. Naslain

J. Phys. IV France, 05 C5 (1995) C5-105-C5-112

DOI: https://doi.org/10.1051/jphyscol:1995510

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