Articles citing this article

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Cited article:

Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

M J Prest, Y Wang, F Huang and M J Lancaster
Journal of Micromechanics and Microengineering 18 (12) 125003 (2008)
https://doi.org/10.1088/0960-1317/18/12/125003