Articles citing this article

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The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Demonstration of 20 nm half-pitch spatial resolution with soft x-ray microscopy

W. Chao, E. H. Anderson, G. Denbeaux, et al.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21 (6) 3108 (2003)
https://doi.org/10.1116/1.1619956