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Cited article:

MOCVD of aluminium oxide films using aluminium β-diketonates as precursors

A. Devi, S.A. Shivashankar, A.G. Samuelson

J. Phys. IV France, 12 4 (2002) 139-146

DOI: https://doi.org/10.1051/jp4:20020088

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