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Cited article:

Influence of the concentration of ZrCl4 on texture, morphology and growth rate of CVD grown α-Al2O3 coatings deposited by the AlCl3/ZrCl4/H2/CO2/H2S process

Per Mårtensson
Surface and Coatings Technology 200 (11) 3626 (2006)
https://doi.org/10.1016/j.surfcoat.2005.01.008