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Cited article:

MONITORING COMPOSITION AND STRUCTURE OF MOCVD ZrO2-BASED MULTICOMPONENT FILMS BY INNOVATIVE MIXED METAL-ORGANIC PRECURSORS

V. V. Krisyuk, D. Samélor, A. E. Turgambaeva, et al.
Journal of Structural Chemistry 61 (11) 1729 (2020)
https://doi.org/10.1134/S0022476620110074